193nm Air Spaced Zero Order Waveplate , without adhesive layers, has strong structural stability and anti-aging performance. Quartz resists deep UV corrosion, suits continuous high-power laser operation, with consistent polarization control.
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Features: Air Spaced Thickness 0.3~1.5mm Hight Damage Threshold AR coated and Mounted |
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Item No :
WPA-193nmProduct Origin :
FuZhouSpecifications:
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Material:
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Quartz
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Diameter Tolerance:
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+0.0, -0.1mm
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Wavefront Distortion :
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λ/8 @ 632.8nm
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Retardation Tolerance:
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λ/50
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Parallelism:
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<1 arc second
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Surface Quality:
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20/10
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Clear Aperture:
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>80%
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Coating:
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S1&S2: R<0.2% @ wavelength
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Standard wavelength:
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193nm
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Standard Products:
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Half Waveplates P/N#
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Quarter Waveplates P/N#
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Diameter(mm)
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WPA-210-193
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WPA-410-193
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10.0
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WPA-212-193
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WPA-412-193
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12.7
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WPA-215-193
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WPA-415-193
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15.0
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WPA-220-193
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WPA-420-193
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20.0
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WPA-225-193
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WPA-425-193
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25.4
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WPA-230-193
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WPA-430-193
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30.0
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WPA-235-193
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WPA-435-193
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35.0
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WPA-250-193
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WPA-450-193
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50.0
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Technical Advantages of 193nm Air Spaced Zero-Order Waveplate：
The 193nm air-gap waveplate uses a dual-quartz air-spaced structure, greatly reducing material absorption loss, with excellent transmittance in deep UV bands like ArF excimer lasers. Its air-gap design avoids thermal stress from bonding, enduring long-term high-power laser operation. Incorporating ion beam finishing, it achieves nanoscale surface flatness, significantly reducing scattering loss and optimizing wavefront quality, suitable for high-precision polarization control in lithography.
193nm Glan-Taylor Polarizer utilizes α-BBO birefringent crystals separated by an air gap to eliminate absorption issues from adhesive materials in the deep UV range. Single-layer MgF₂ anti-reflective coatings ensure high transmission at 193nm while maintaining excellent extinction performance. Engineered with a high laser damage threshold, it is ideal for high-precision polarization control in applications such as ArF excimer laser lithography and deep-UV laser processing. Features: Air-Spaced Close to Brewster's Angle Cutting High Polarization Purity Deep ultraviolet transmission
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The 193nm Glan laser prism uses EUV Crystal with high optical uniformity, featuring excellent polarization stability in narrow bandwidth. Precision packaging reduces optical path deviation, suitable for high-precision deep-UV laser detection. Features: Air-Spaced Close to Brewster's Angle Cutting High Polarization Purity Mounted with escape window Suitable for High Power Application
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Rochon polarizer separates incident beam into ordinary ray and extrordinary ray like wollaston polarizer, but extraordinary ray is straight transmitted through, while ordinary is transmitted with a deviation angle. Features: Glue-Free Optical Path High Polarization Purity Suitable for medium to low power applications
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193nm Low Order Waveplate, a deep ultraviolet polarization device, precisely adjusts incident light's polarization state. Used in DUV systems like lithography and laser research, it's made of 193nm-radiation-resistant materials for stability and accuracy. Features: Thickness: 0.05-0.5 mm High Damage Threshold
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193nm Air Spaced Zero Order Waveplate , without adhesive layers, has strong structural stability and anti-aging performance. Quartz resists deep UV corrosion, suits continuous high-power laser operation, with consistent polarization control. Features: Air Spaced Thickness 0.3~1.5mm Hight Damage Threshold AR coated and Mounted
Read More
The VUV Customized Polarizers for Laser series operates at a wavelength of 193.368nm, covering a wavelength range of 160 - 250nm. This series includes VUV Thin Crystal Polarizer, Rochon Polarizer, Glan - Polarizer, VUV Wide Field Angle Waveplate, etc. These products are suitable for various laser application scenarios. With their high precision and reliability, they provide professional polarization solutions for the vacuum ultraviolet laser field. Whether for scientific research or industrial applications, they can meet customers' strict requirements for optical components. Customers in need can contact us.
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