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193nm Air Spaced Zero Order Waveplate

Home VUV Customized Polarizers for Laser @193nm

193nm Air Spaced Zero Order Waveplate

deep ultraviolet waveplate
193nm Air Spaced Zero Order Waveplate

193nm Air Spaced Zero Order Waveplate , without adhesive layers, has strong structural stability and anti-aging performance. Quartz resists deep UV corrosion, suits continuous high-power laser operation, with consistent polarization control.

 

Features:

Air Spaced

Thickness 0.8~2.0mm

Hight Damage Threshold

AR coated and Mounted

  • Item No :

    WPA-193nm
  • Product Origin :

    FuZhou
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Specifications:

Material:
Quartz
Diameter Tolerance:
+0.0, -0.1mm
Wavefront Distortion :
λ/8 @ 632.8nm
Retardation Tolerance:
λ/50
Parallelism:
<1 arc second
Surface Quality:
20/10
Clear Aperture:
>80%
Coating:
S1&S2: R<0.2% @ wavelength
Standard wavelength:
193nm

Standard Products:

Half Waveplates P/N#
Quarter Waveplates P/N#
Diameter(mm)
WPA-210-193
WPA-410-193
10.0
WPA-212-193
WPA-412-193
12.7
WPA-215-193
WPA-415-193
15.0
WPA-220-193
WPA-420-193
20.0
WPA-225-193
WPA-425-193
25.4
WPA-230-193
WPA-430-193
30.0
WPA-235-193
WPA-435-193
35.0
WPA-250-193
WPA-450-193
50.0

 

Technical Advantages of 193nm Air Spaced Zero-Order Waveplate:

The 193nm air-gap waveplate uses a dual-quartz air-spaced structure, greatly reducing material absorption loss, with excellent transmittance in deep UV bands like ArF excimer lasers. Its air-gap design avoids thermal stress from bonding, enduring long-term high-power laser operation. Incorporating ion beam finishing, it achieves nanoscale surface flatness, significantly reducing scattering loss and optimizing wavefront quality, suitable for high-precision polarization control in lithography.

 

 

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