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193nm Glan Taylor Polarizers

Home VUV Customized Polarizers for Laser @193nm

193nm Glan Taylor Polarizers

deep ultraviolet transmission
193nm Glan Taylor Polarizers

193nm Glan-Taylor Polarizer utilizes α-BBO birefringent crystals separated by an air gap to eliminate absorption issues from adhesive materials in the deep UV range. Single-layer MgF₂ anti-reflective coatings ensure high transmission at 193nm while maintaining excellent extinction performance. Engineered with a high laser damage threshold, it is ideal for high-precision polarization control in applications such as ArF excimer laser lithography and deep-UV laser processing.

 

Features:

Air-Spaced

Close to Brewster's Angle Cutting

High Polarization Purity

Deep ultraviolet transmission

 

  • Item No :

    GTP-193
  • Product Origin :

    FuZhou
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Specifications:

Material: Deep ultraviolet materials
Wavelength Range: 193.368nm
Extinction Ratio: <1x10-4
Parallelism: <1 arc Min
Surface Quality: 20/10
Beam Deviation: < 3 arc minutes
Wavefornt Distortion: 1/4@632.8nm
Damage Threshold: >200 MW/cm2

 

193nm Glan Taylor Polarizer

Part No. Wavelength Rang(nm) Extinction Ratio Angular Field(°) C.A. fa(mm) O.D. fd(mm) L ±0.1(mm)
GTP4006 193.368 <5x10-6 >6.0 5.0 25.4 13.0
GTP4008 6.5 25.4 14.0
GTP4010 8.0 25.4 16.0
GTP4013 10.0 25.4 20.0
GTP4015 12.0 30.0 23.0
GTP4020 18.0 38.1 28.0
GTP4025 22.0 50.8 33.0

 

The technical advantages of 193nm Glan-Taylor Polarizer

The 193nm Glan-Taylor Polarizer features deep-UV-compatible materials, which have ultra-low absorption and excellent transmittance at 193nm, precisely maintaining polarization direction. Its air-gap design avoids absorption interference from adhesives in deep UV, paired with dedicated anti-reflective coatings to reduce reflection loss, suiting high-power deep-UV laser scenarios.

 

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